Design and Validation of a Single-SOI-Wafer 4-DOF Crawling Microgripper

Design and Validation of a Single-SOI-Wafer 4-DOF Crawling Microgripper

This paper deals with the manipulation of micro-objects operated by a new concept multi-hinge multi-DoF (degree of freedom) microsystem. The system is composed of a planar 3-DoF microstage and of a set of one-DoF microgrippers, and it is arranged is such a way as to allow any microgripper to crawl o...

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Bibliographic Details
Main Authors: Matteo Verotti, Alvise Bagolini, Pierluigi Bellutti, Nicola Pio Belfiore
Format: Article
Language:English
Published: MDPI AG 2019-06-01
Series:Micromachines
Subjects:
microgripper
microstage
lab-on-chip
flexure
conjugate surface flexure hinge (CSFH)
silicon-on-insulator (SOI) wafer
deep-reactive ion etching (DRIE)
Online Access:https://www.mdpi.com/2072-666X/10/6/376

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https://www.mdpi.com/2072-666X/10/6/376

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