| Summary: | In this work, the latest achievements in the field of copper oxide thin film gas sensors are presented and discussed. Several methods and deposition techniques are shown with their advantages and disadvantages for commercial applications. Recently, CuO thin film gas sensors have been studied to detect various compounds, such as: nitrogen oxides, carbon oxides, hydrogen sulfide, ammonia, as well as several volatile organic compounds in many different applications, e.g., agriculture. The CuO thin film gas sensors exhibited high 3-S parameters (sensitivity, selectivity, and stability). Furthermore, the possibility to function at room temperature with long-term stability was proven as well, which makes this material very attractive in gas-sensing applications, including exhaled breath analysis.
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