A combined virtual impactor and field-effect transistor microsystem for particulate matter separation and detection
Ambient suspended particulate matter (PM) (primarily with particle diameter 2.5 µm or less, i.e., PM2.5) can adversely affect ecosystems and human health. Currently, optical particle sensors based on light scattering dominate the portable PM sensing market. However, the light scattering method has p...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-03-01
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| Series: | Nanotechnology and Precision Engineering |
| Online Access: | http://dx.doi.org/10.1063/10.0003447 |