RIFTA: A Robust Iterative Fourier Transform-based dwell time Algorithm for ultra-precision ion beam figuring of synchrotron mirrors

RIFTA: A Robust Iterative Fourier Transform-based dwell time Algorithm for ultra-precision ion beam figuring of synchrotron mirrors

Abstract With the rapid evolution of synchrotron X-ray sources, the demand for high-precision X-ray mirrors has greatly increased. Single nanometer profile error is required to keep imaging capability at the diffraction limit. Ion Beam Figuring (IBF), as a highly deterministic surfacing technique, h...

Full description

Bibliographic Details
Main Authors: Tianyi Wang, Lei Huang, Hyukmo Kang, Heejoo Choi, Dae Wook Kim, Kashmira Tayabaly, Mourad Idir
Format: Article
Language:English
Published: Nature Publishing Group 2020-05-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-020-64923-3

Similar Items

Similar Items