Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses

Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water layer, non-linear self-action mechanisms transform th...

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Main Authors:	Simas Butkus, Aleksandr Alesenkov, Domas Paipulas, Eugenijus Gaižauskas, Andrius Melninkaitis, Dalia Kaškelytė, Martynas Barkauskas, Valdas Sirutkaitis
Format:	Article
Language:	English
Published:	MDPI AG 2015-12-01
Series:	Micromachines
Subjects:	femtosecond ablation micromachining light filaments optimization shadowgraphy
Online Access:	http://www.mdpi.com/2072-666X/6/12/1471

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spelling	doaj-a1a3181e6e41438cbdf893a3b22053122020-11-25T00:35:47ZengMDPI AGMicromachines2072-666X2015-12-016122010202210.3390/mi6121471mi6121471Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond PulsesSimas Butkus0Aleksandr Alesenkov1Domas Paipulas2Eugenijus Gaižauskas3Andrius Melninkaitis4Dalia Kaškelytė5Martynas Barkauskas6Valdas Sirutkaitis7Laser Research Centre, Vilnius University, Saulėtekio Av. 10, Vilnius LT-10223, LithuaniaLaser Research Centre, Vilnius University, Saulėtekio Av. 10, Vilnius LT-10223, LithuaniaLaser Research Centre, Vilnius University, Saulėtekio Av. 10, Vilnius LT-10223, LithuaniaLaser Research Centre, Vilnius University, Saulėtekio Av. 10, Vilnius LT-10223, LithuaniaLaser Research Centre, Vilnius University, Saulėtekio Av. 10, Vilnius LT-10223, LithuaniaLaser Research Centre, Vilnius University, Saulėtekio Av. 10, Vilnius LT-10223, LithuaniaLaser Research Centre, Vilnius University, Saulėtekio Av. 10, Vilnius LT-10223, LithuaniaLaser Research Centre, Vilnius University, Saulėtekio Av. 10, Vilnius LT-10223, LithuaniaMicromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water layer, non-linear self-action mechanisms transform the beam, which enables higher quality and throughput micromachining results compared to focusing in air. Evidence of beam transformation into multiple light filaments is presented along with theoretical modeling results. In addition, multiparametric optimization of the fabrication process was performed using statistical methods and certain acquired dependencies are further explained and tested using laser shadowgraphy. We demonstrate that this micromachining process exhibits complicated dynamics within the water layer, which are influenced by the chosen parameters.http://www.mdpi.com/2072-666X/6/12/1471femtosecond ablationmicromachininglight filamentsoptimizationshadowgraphy
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Simas Butkus Aleksandr Alesenkov Domas Paipulas Eugenijus Gaižauskas Andrius Melninkaitis Dalia Kaškelytė Martynas Barkauskas Valdas Sirutkaitis
spellingShingle	Simas Butkus Aleksandr Alesenkov Domas Paipulas Eugenijus Gaižauskas Andrius Melninkaitis Dalia Kaškelytė Martynas Barkauskas Valdas Sirutkaitis Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses Micromachines femtosecond ablation micromachining light filaments optimization shadowgraphy
author_facet	Simas Butkus Aleksandr Alesenkov Domas Paipulas Eugenijus Gaižauskas Andrius Melninkaitis Dalia Kaškelytė Martynas Barkauskas Valdas Sirutkaitis
author_sort	Simas Butkus
title	Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses
title_short	Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses
title_full	Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses
title_fullStr	Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses
title_full_unstemmed	Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses
title_sort	analysis of the micromachining process of dielectric and metallic substrates immersed in water with femtosecond pulses
publisher	MDPI AG
series	Micromachines
issn	2072-666X
publishDate	2015-12-01
description	Micromachining of 1 mm thick dielectric and metallic substrates was conducted using femtosecond pulse generated filaments in water. Several hundred microjoule energy pulses were focused within a water layer covering the samples. Within this water layer, non-linear self-action mechanisms transform the beam, which enables higher quality and throughput micromachining results compared to focusing in air. Evidence of beam transformation into multiple light filaments is presented along with theoretical modeling results. In addition, multiparametric optimization of the fabrication process was performed using statistical methods and certain acquired dependencies are further explained and tested using laser shadowgraphy. We demonstrate that this micromachining process exhibits complicated dynamics within the water layer, which are influenced by the chosen parameters.
topic	femtosecond ablation micromachining light filaments optimization shadowgraphy
url	http://www.mdpi.com/2072-666X/6/12/1471
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Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses

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