Exchangeable Miniaturized Mass Spectrometer Chip Based on Silicon Structures

Exchangeable Miniaturized Mass Spectrometer Chip Based on Silicon Structures

This paper reports a design of an exchangeable miniaturized mass spectrometry chip using spring-loaded pins and O-rings for electrical and fluidic connections. This planar microelectromechanical system (MEMS)-chip works with 300 µm high silicon structures between two borosilicate glasses and has a s...

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Bibliographic Details
Main Authors: Stephan Westerdick, Patrick Hermanns, Benedikt Janßen, Thomas Musch
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Proceedings
Subjects:
micro-mass spectrometer
MEMS-Chip
silicon-chip
spring-loaded pin
o-ring
LiGa-technology
travelling wave
Online Access:https://www.mdpi.com/2504-3900/2/13/1071

Internet

https://www.mdpi.com/2504-3900/2/13/1071

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