Narrow-aperture electron beam in the forevacuum pressure range as a tool for dimensional processing of silica glass

• Main Authors: Zenin Aleksey, Klimov Aleksandr, Bakeev Ilya
• Format: Article
• Language: English
• Published: EDP Sciences 2018-01-01
• Series: MATEC Web of Conferences
• Online Access: https://doi.org/10.1051/matecconf/201814303006

The paper gives overview of the results of using narrow-aperture electron beam generated by a forevacuum plasma electron source as a tool for treatment of electrically non-conductive materials, such as technical glass. Effectiveness of electron beam treatment of non-conductive materials is caused by almost complete neutralization of target charge on the treated surface. Charge neutralization occurs due to ion flow from beam plasma generated while transporting the beam through forevacuum pressure area. The study demonstrates the possibility to control depth and form of milling by changing modes of electron beam treatment. Combined use of electron beam and automated system for beam deflection and sweep makes possible to perform dimensional processing, particularly cutting and milling with complex trajectory. Milling rates were experimentally found depending on treatment time and mode. The suggested method of silica glass treatment represents an alternative for traditional treatment methods.