Performance Improvement of GaN Based Laser Diode Using Pd/Ni/Au Metallization Ohmic Contact

Performance Improvement of GaN Based Laser Diode Using Pd/Ni/Au Metallization Ohmic Contact

We report an investigation of the effects of different metal systems and surface treatment on the contact performance of GaN lasers. We found that multi-element metal alloy and surface chemical treatment are the keys to achieve good ohmic behavior contacts on GaN laser diodes. Pd/Ni/Au contact demon...

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Bibliographic Details
Main Authors: Wenjie Wang, Wuze Xie, Zejia Deng, Haojun Yang, Mingle Liao, Junze Li, Xiaojia Luo, Song Sun, Degang Zhao
Format: Article
Language:English
Published: MDPI AG 2019-04-01
Series:Coatings
Subjects:
GaN
laser diode
ohmic contact
PVD deposition
alloys
Pd/Ni/Au
Online Access:https://www.mdpi.com/2079-6412/9/5/291

Internet

https://www.mdpi.com/2079-6412/9/5/291

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