A Study of Polycrystalline Silicon Damage Features Based on Nanosecond Pulse Laser Irradiation with Different Wavelength Effects

A Study of Polycrystalline Silicon Damage Features Based on Nanosecond Pulse Laser Irradiation with Different Wavelength Effects

Based on PVDF (piezoelectric sensing techniques), this paper attempts to study the propagation law of shock waves in brittle materials during the process of three-wavelength laser irradiation of polysilicon, and discusses the formation mechanism of thermal shock failure. The experimental results sho...

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Bibliographic Details
Main Authors: Jiangmin Xu, Chao Chen, Tengfei Zhang, Zhenchun Han
Format: Article
Language:English
Published: MDPI AG 2017-03-01
Series:Materials
Subjects:
laser wavelength
polysilicon
laser damage
thermal shock
Online Access:http://www.mdpi.com/1996-1944/10/3/260

Internet

http://www.mdpi.com/1996-1944/10/3/260

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