A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for in Situ Measurement at 600 °C
In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists...
Main Authors: | Qiulin Tan, Chen Li, Jijun Xiong, Pinggang Jia, Wendong Zhang, Jun Liu, Chenyang Xue, Yingping Hong, Zhong Ren, Tao Luo |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2014-01-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/14/2/2417 |
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