A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for in Situ Measurement at 600 °C

A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for in Situ Measurement at 600 °C

In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists...

Full description

Bibliographic Details
Main Authors: Qiulin Tan, Chen Li, Jijun Xiong, Pinggang Jia, Wendong Zhang, Jun Liu, Chenyang Xue, Yingping Hong, Zhong Ren, Tao Luo
Format: Article
Language:English
Published: MDPI AG 2014-01-01
Series:Sensors
Subjects:
high-temperature pressure sensor
in situ test
alumina ceramic
LC circuit
Online Access:http://www.mdpi.com/1424-8220/14/2/2417

Internet

http://www.mdpi.com/1424-8220/14/2/2417

Similar Items