Ultra-Long-Term Reliable Encapsulation Using an Atomic Layer Deposited HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> Triple-Interlayer for Biomedical Implants

Ultra-Long-Term Reliable Encapsulation Using an Atomic Layer Deposited HfO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> Triple-Interlayer for Biomedical Implants

Long-term packaging of miniaturized, flexible implantable medical devices is essential for the next generation of medical devices. Polymer materials that are biocompatible and flexible have attracted extensive interest for the packaging of implantable medical devices, however realizing these devices...

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Bibliographic Details
Main Authors: Changzheng Li, Maarten Cauwe, Yang Yang, David Schaubroeck, Lothar Mader, Maaike Op de Beeck
Format: Article
Language:English
Published: MDPI AG 2019-09-01
Series:Coatings
Subjects:
Al<sub>2</sub>O<sub>3</sub>
HfO<sub>2</sub>
polyimide
EIS
moisture barriers
lifetime
implantable medical devices
Online Access:https://www.mdpi.com/2079-6412/9/9/579

Internet

https://www.mdpi.com/2079-6412/9/9/579

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