Design and Preparation of a 6-Channel Fan-Shaped Integrated Narrow-Band Filter in the Mid-Infrared Band
A six-channel fan-shaped integrated narrow-band filter on a silicon substrate was designed on the basis of the Fabray–Perot (FP) theory and was fabricated using e-beam thermal evaporation. The central wavelength was modulated by modifying the FP cavity thickness using the combination mask method. Ge...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-09-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/9/9/567 |