Fast Fabrication of Complex Surficial Micro-Features Using Sequential Lithography and Jet Electrochemical Machining

Fast Fabrication of Complex Surficial Micro-Features Using Sequential Lithography and Jet Electrochemical Machining

This paper presents fabrication of complex surficial micro-features employing a cross-innovative hybrid process inspired from lithography and Jet-ECM. The process is referred here as mask electrolyte jet machining (MEJM). MEJM is a non-contact machining process which combines high resolution of lith...

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Bibliographic Details
Main Authors: Ming Wu, Krishna Kumar Saxena, Zhongning Guo, Jun Qian, Dominiek Reynaerts
Format: Article
Language:English
Published: MDPI AG 2020-10-01
Series:Micromachines
Subjects:
electrochemical micromachining
surface microstructures
micro letters
Online Access:https://www.mdpi.com/2072-666X/11/10/948

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