A Control and Detecting System of Micro-Near-Infrared Spectrometer Based on a MOEMS Scanning Grating Mirror

A Control and Detecting System of Micro-Near-Infrared Spectrometer Based on a MOEMS Scanning Grating Mirror

Based on the scanning grating mirror we developed, this paper presents a method of the precise control of a scanning grating mirror and of high-speed spectrum data detection. In addition, the system circuit of the scanning grating mirror control and spectrum signal detecting is designed and manufact...

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Bibliographic Details
Main Authors:	Haitao Liu, Zhiyu Wen, Dongling Li, Jian Huang, Ying Zhou, Pengfei Guo
Format:	Article
Language:	English
Published:	MDPI AG 2018-03-01
Series:	Micromachines
Subjects:	micro-NIR spectrometer scanning grating mirror control detecting circuits
Online Access:	http://www.mdpi.com/2072-666X/9/4/152

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