Summary: | We report on manufacturing of a compact beam homogenizer module including two lens arrays and an aperture. Lens arrays are fabricated by an all laser-based technology employing a precise femtosecond pulsed laser ablation and a CO<inline-formula><math display="inline"><semantics><msub><mrow></mrow><mn>2</mn></msub></semantics></math></inline-formula> laser polishing step. Each lens array is processed revealing a high contour accuracy and a roughness of 25 nm. The 8x8 lens arrays are designed to have a square footprint to generate a quadratic Top-Hat beam profile and focal length of 10 mm to realize compact packaging. Firstly, the lens arrays are tested in an experimental setup using commercial lens holders with their functionality being demonstrated by shaping a uniform 4.5 mm squared Top-Hat beam profile, as being calculated. Afterwards, a 3D printer is used to additively manufacture the housing for the beam homogenizer module having a length of only 16 mm. After assembling the laser-fabricated lens arrays and a laser-cutted aperture into the housing, the functionality of the miniaturized module is proven.
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