Relationship between Oxygen Defects and Properties of Scandium Oxide Films Prepared by Ion-Beam Sputtering

• Main Authors: Pengfei Kong, Yunti Pu, Ping Ma, Jiliang Zhu
• Format: Article
• Language: English
• Published: MDPI AG 2019-08-01
• Series: Coatings
• Subjects: scandium oxide thin films; ion-beam sputtering; oxygen flow rates; oxygen defects; properties
• Online Access: https://www.mdpi.com/2079-6412/9/8/517

Scandium oxide (Sc₂O₃) thin films with different numbers of oxygen defects were prepared by ion-beam sputtering under different oxygen flow rates. The results showed that the oxygen defects heavily affected crystal phases, optical properties, laser-induced damage threshold (LIDT) and surface quality of Sc₂O₃ films. The thin film under 0 standard-state cubic centimeter per minute (sccm) oxygen flow rate had the largest number of oxygen defects, which resulted in the lowest transmittance, LIDT and the worst surface quality. In addition, the refractive index of 0 sccm Sc₂O₃ film could not be measured in the same way. When the oxygen flow rate was 15 sccm, the Sc₂O₃ film possessed the best transmittance, refractive index, LIDT and surface roughness due to the lowest number of oxygen defects. This work elucidated the relationship between oxygen defects and properties of Sc₂O₃ films. Controlling oxygen flow rate was an important step of limiting the number of oxygen defects, which is of great significance for industrial production.