Characteristics of Carbide Interfacial Layer Formed During Deposition of DLC Films on 316L Stainless Steel Substrate
The paper presents the analysis of formation of interfacial layer during deposition of diamond like carbon film (DLC) on the 316L stainless steel by capacitive plasma discharge in the CH4 atmosphere. The structure of the interfacial layer of DLC film was strongly affected by the temperature increase...
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| Format: | Article |
| Language: | English |
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Polish Academy of Sciences
2017-12-01
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| Series: | Archives of Metallurgy and Materials |
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| Online Access: | http://www.degruyter.com/view/j/amm.2017.62.issue-4/amm-2017-0326/amm-2017-0326.xml?format=INT |