Charging mechanism of electret film made of potassium-ion-doped SiO2
A charging model is proposed for an electret film made of potassium-ion-doped SiO2 that can be formed between the two opposing micro-electrodes of a micro-electrostatic actuator, separated by a microscopic gap. On the basis of experimental evidence that charging only occurs in the positively biased...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4943528 |