Dense Plasma Focus-Based Nanofabrication of III–V Semiconductors: Unique Features and Recent Advances
The hot and dense plasma formed in modified dense plasma focus (DPF) device has been used worldwide for the nanofabrication of several materials. In this paper, we summarize the fabrication of III–V semiconductor nanostructures using the high fluence material ions produced by hot, dense and extremel...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2015-12-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | http://www.mdpi.com/2079-4991/6/1/4 |