Structural and Electrical Properties of Polysilicon Films Prepared by AIC Process for a Polycrystalline Silicon Solar Cell Seed Layer

Structural and Electrical Properties of Polysilicon Films Prepared by AIC Process for a Polycrystalline Silicon Solar Cell Seed Layer

Polycrystalline silicon (pc-Si) films are produced by aluminum-induced crystallization (AIC) process for a polycrystalline silicon solar cell seed layer, and the structural and electrical properties of the films are analyzed. The used structure is glass/Al/ Al2O3/a-Si, and the thickness of Al2O3 lay...

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Bibliographic Details
Main Authors:	Hyejeong Jeong, Seongjae Boo
Format:	Article
Language:	English
Published:	Hindawi Limited 2012-01-01
Series:	International Journal of Photoenergy
Online Access:	http://dx.doi.org/10.1155/2012/593257

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