Capacitive based Micromachined Resonators for Low Level Mass Detection

Capacitive based Micromachined Resonators for Low Level Mass Detection

<b> </b>Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array...

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Bibliographic Details
Main Authors: Muhammad Umair Nathani, Haleh Nazemi, Calvin Love, Yameema Babu Lopez, Siddharth Swaminathan, Arezoo Emadi
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Micromachines
Subjects:
capacitive
clamped membrane
gas detection
gas sensor
gravimetric
microbridge
Online Access:https://www.mdpi.com/2072-666X/12/1/13

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