A first-principles analysis of ballistic conductance, grain boundary scattering and vertical resistance in aluminum interconnects
We present an ab initio evaluation of electron scattering mechanisms in Al interconnects from a back-end-of-line (BEOL) perspective. We consider the ballistic conductance as a function of nanowire size, as well as the impact of surface oxidation on electron transport. We also consider several repres...
Main Authors: | Tianji Zhou, Nicholas A. Lanzillo, Prasad Bhosale, Daniel Gall, Roger Quon |
---|---|
Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2018-05-01
|
Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5027084 |
Similar Items
-
Diffusive-to-ballistic transition in grain boundary motion studied by atomistic simulations
by: Deng, Chuang, et al.
Published: (2012) -
Scattering Theory of Graphene Grain Boundaries
by: Francesco Romeo, et al.
Published: (2018-09-01) -
Computation of conductance for ballistic nanostructures
by: Martin, Shashi A.
Published: (2011) -
Ballistic Heat Transport in Nanocomposite: The Role of the Shape and Interconnection of Nanoinclusions
by: Paul Desmarchelier, et al.
Published: (2021-07-01) -
Grain boundary precipitation in aluminum alloy 7075
by: Fattal, Georges Levon
Published: (2021)