Thermally Induced Nano-Structural and Optical Changes of nc-Si:H Deposited by Hot-Wire CVD
<p>Abstract</p> <p>We report on the thermally induced changes of the nano-structural and optical properties of hydrogenated nanocrystalline silicon in the temperature range 200–700 °C. The as-deposited sample has a high crystalline volume fraction of 53% with an...
Main Authors: | , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
SpringerOpen
2009-01-01
|
Series: | Nanoscale Research Letters |
Subjects: | |
Online Access: | http://dx.doi.org/10.1007/s11671-008-9243-0 |