| Summary: | The paper aims to assess and improve the performances of a multilayer piezoelectric MEMS device for vibrations harnessing. Two operating modes are possible: at resonance and outside resonance. In some applications it is not possible to operate at resonance, functioning being mostly at low frequencies in a quasi-static regime. An Euler-Bernoulli classic beam theory mathematical model was studied for estimating the behaviour of multilayer piezoelectric generators, in terms of deflection and voltage, at functioning under resonance frequency. The analytical results were compared with the finite element method simulation in COMSOL Multiphysics. The main goal of this study is to obtain an accurate model for engineering design purposes, with simple analytical equations and ease of use, but with predictable errors. The study proved the usefulness of the derived model but also its limitations. It also proves the need to improve the model using plate theory, for sensors with high width/height ratio.
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