A Dual-Chamber Serial–Parallel Piezoelectric Pump with an Integrated Sensor for Flow Rate Measurement

A Dual-Chamber Serial–Parallel Piezoelectric Pump with an Integrated Sensor for Flow Rate Measurement

A new concept of a dual-chamber serial-parallel piezoelectric pump with an integrated sensor (DSPPIS) is presented in this paper. By means of dividing a piezoelectric bimorph into an actuator and a sensor, sensing function is integrated onto the DSPPIS for flow rate measurement. A prototype of the D...

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Bibliographic Details
Main Authors: Song Chen, Mai Yu, Junwu Kan, Jianping Li, Zhonghua Zhang, Xinyi Xie, Xiaomin Wang
Format: Article
Language:English
Published: MDPI AG 2019-03-01
Series:Sensors
Subjects:
piezoelectric pump
integrated sensor
serial connection
parallel connection
Online Access:https://www.mdpi.com/1424-8220/19/6/1447

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