A Dual-Chamber Serial–Parallel Piezoelectric Pump with an Integrated Sensor for Flow Rate Measurement
A new concept of a dual-chamber serial-parallel piezoelectric pump with an integrated sensor (DSPPIS) is presented in this paper. By means of dividing a piezoelectric bimorph into an actuator and a sensor, sensing function is integrated onto the DSPPIS for flow rate measurement. A prototype of the D...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-03-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/19/6/1447 |