Surface Topography Measurement of Mirror-Finished Surfaces Using Fringe-Patterned Illumination

Mirror-finished surface products have a wide range of applications in different engineering industries, such as power generation, aerospace, semiconductors and optics. The surface topography of mirror-finished products is typically measured in a metrology laboratory, which is typically time consumin...

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Bibliographic Details
Main Authors: Shaowei Fu, Fang Cheng, Tegoeh Tjahjowidodo
Format: Article
Language:English
Published: MDPI AG 2020-01-01
Series:Metals
Subjects:
Online Access:https://www.mdpi.com/2075-4701/10/1/69