Development of Si-based electrical biosensors: Simulations and first experimental results
In this work, we simulated and experimentally assessed the possibility to detect, through electrical transduction, hybridization of DNA molecules on MOS-like devices, having different dielectrics: SiO2, Si3N4 and SiO2/Si3N4/SiO2 (ONO). The electrical characterization was performed after the various...
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2015-12-01
|
| Series: | Sensing and Bio-Sensing Research |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2214180415300374 |