Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications

Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications

We present the feasibility in fabricating membranes and cantilevers made of diamond grown on Si/SiO<sub>2</sub> substrates by femtosecond laser ablation. In the ablation process, we generated nano- and microstructures on the membrane surface. Such laser-induced periodic surface structure...

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Bibliographic Details
Main Authors: Johann Zehetner, Alexander Kromka, Tibor Izsák, Gabriel Vanko, Lenka Gajdošová, Stephan Kasemann
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Proceedings
Subjects:
MEMS
diamond
laser ablation
laser-induced periodic surface structures
Online Access:https://www.mdpi.com/2504-3900/56/1/13
Description
Summary:We present the feasibility in fabricating membranes and cantilevers made of diamond grown on Si/SiO<sub>2</sub> substrates by femtosecond laser ablation. In the ablation process, we generated nano- and microstructures on the membrane surface. Such laser-induced periodic surface structures (LIPSS) are useful in tailoring the surface chemistry. In combination with wet or reactive ion etching, smooth membranes were generated.
ISSN:2504-3900

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