HIGH TEMPERATURE ANNEALING INFLUENCE ON STRUCTURE AND COMPOSITION OF a-Si/ZrO2 AND a-SiOx/ZrO2 MULTILAYERED NANOPERIODICAL STRUCTURES BY SYNCHROTRON XANES INVESTIGATIONS
With the use of high brilliance synchrotron radiation the composition and structure of a-Si/ZrO2 and a-SiOx/ZrO2 multilayered nanoperiodical structures subjected to high temperature annealing were investigated. Each ZrO2 layers thickness was 2 nm while for a-Si or a-SiOx layers thickness was 8 nm wi...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Voronezh State University
2018-09-01
|
| Series: | Конденсированные среды и межфазные границы |
| Subjects: |