Kinetic analysis of the chemical processes in the decomposition of gaseous dielectrics by a non-equilibrium plasma - part 1: CF4 and CF4/O2
Numerical integration of the coupled differential equations which describe a chemical reacting system and sensitivity analysis are becoming increasingly important tools in chemical kinetics. In this work, a numerical modelling analysis of the chemical processes in the gas-phase decomposition of pure...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Sociedade Brasileira de Química
2000-01-01
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| Series: | Journal of the Brazilian Chemical Society |
| Subjects: | |
| Online Access: | http://www.scielo.br/scielo.php?script=sci_arttext&pid=S0103-50532000000200004 |