Development of a MEMS Plate Based on Thin-Film Piezoelectric AlN Actuators for Biological Applications

Development of a MEMS Plate Based on Thin-Film Piezoelectric AlN Actuators for Biological Applications

This paper presents the development of a lab-on-chip system based on the use of local vibrations to mechanically stimulate biological materials. It reports on the development and characterization of a piezoelectric actuators driven system designed to operate in liquid media. The microfluidic packagi...

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Bibliographic Details
Main Authors: Baptiste Neff, Fabrice Casset, Arnaud Millet, Vincent Agache, Nicolas Verplanck, François Boizot, Stéphane Fanget
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
MEMS
piezoelectric actuators
microfluidic
biological applications
Online Access:https://www.mdpi.com/2504-3900/1/4/386

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