Development of a MEMS Plate Based on Thin-Film Piezoelectric AlN Actuators for Biological Applications
This paper presents the development of a lab-on-chip system based on the use of local vibrations to mechanically stimulate biological materials. It reports on the development and characterization of a piezoelectric actuators driven system designed to operate in liquid media. The microfluidic packagi...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-08-01
|
| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/1/4/386 |