Chemistry for electron-induced nanofabrication

Bibliographic Details
Main Authors:	Petra Swiderek, Hubertus Marbach, Cornelis W. Hagen
Format:	Article
Language:	English
Published:	Beilstein-Institut 2018-04-01
Series:	Beilstein Journal of Nanotechnology
Subjects:	electron-induced chemistry, FEBID FEBIP nanofabrication nanolithography
Online Access:	https://doi.org/10.3762/bjnano.9.124

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spelling	doaj-9139bce2de3b4a2480c2a3e2a3f23f112020-11-25T00:30:44ZengBeilstein-InstitutBeilstein Journal of Nanotechnology2190-42862018-04-01911317132010.3762/bjnano.9.1242190-4286-9-124Chemistry for electron-induced nanofabricationPetra Swiderek0Hubertus Marbach1Cornelis W. Hagen2University of Bremen, Faculty 2 (Chemistry/Biology), Institute of Applied and Physical Chemistry, Leobener Straße 5, 28334 Bremen, GermanyLehrstuhl für Physikalische Chemie II and Interdisciplinary Center for Molecular Materials (ICMM), Friedrich-Alexander-Universität Erlangen-Nürnberg, Egerlandstr. 3, 91058 Erlangen, Germany,Department of Imaging Physics, Delft University of Technology, Lorentzweg 1, 2628CJ Delft, The Netherlandshttps://doi.org/10.3762/bjnano.9.124electron-induced chemistry, FEBIDFEBIPnanofabricationnanolithography
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Petra Swiderek Hubertus Marbach Cornelis W. Hagen
spellingShingle	Petra Swiderek Hubertus Marbach Cornelis W. Hagen Chemistry for electron-induced nanofabrication Beilstein Journal of Nanotechnology electron-induced chemistry, FEBID FEBIP nanofabrication nanolithography
author_facet	Petra Swiderek Hubertus Marbach Cornelis W. Hagen
author_sort	Petra Swiderek
title	Chemistry for electron-induced nanofabrication
title_short	Chemistry for electron-induced nanofabrication
title_full	Chemistry for electron-induced nanofabrication
title_fullStr	Chemistry for electron-induced nanofabrication
title_full_unstemmed	Chemistry for electron-induced nanofabrication
title_sort	chemistry for electron-induced nanofabrication
publisher	Beilstein-Institut
series	Beilstein Journal of Nanotechnology
issn	2190-4286
publishDate	2018-04-01
topic	electron-induced chemistry, FEBID FEBIP nanofabrication nanolithography
url	https://doi.org/10.3762/bjnano.9.124
work_keys_str_mv	AT petraswiderek chemistryforelectroninducednanofabrication AT hubertusmarbach chemistryforelectroninducednanofabrication AT corneliswhagen chemistryforelectroninducednanofabrication
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Chemistry for electron-induced nanofabrication

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