Simulation of a large size inductively coupled plasma generator and comparison with experimental data

Simulation of a large size inductively coupled plasma generator and comparison with experimental data

A two-dimensional axisymmetric inductively coupled plasma (ICP) model with its implementation in the COMSOL (Multi-physics simulation software) platform is described. Specifically, a large size ICP generator filled with argon is simulated in this study. Distributions of the number density and temper...

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Main Authors: Fan Lei, Xiaoping Li, Yanming Liu, Donglin Liu, Min Yang, Yuanyuan Yu
Format: Article
Language:English
Published: AIP Publishing LLC 2018-01-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5016354
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spelling doaj-8fcc907ac3d94f4f9fd1c2b6c65376b32020-11-24T21:17:48ZengAIP Publishing LLCAIP Advances2158-32262018-01-0181015003015003-1610.1063/1.5016354013801ADVSimulation of a large size inductively coupled plasma generator and comparison with experimental dataFan Lei0Xiaoping Li1Yanming Liu2Donglin Liu3Min Yang4Yuanyuan Yu5School of Aerospace Science and Technology, Xidian University, Xi’an Shaanxi 710071, ChinaSchool of Aerospace Science and Technology, Xidian University, Xi’an Shaanxi 710071, ChinaSchool of Aerospace Science and Technology, Xidian University, Xi’an Shaanxi 710071, ChinaSchool of Aerospace Science and Technology, Xidian University, Xi’an Shaanxi 710071, ChinaSchool of Aerospace Science and Technology, Xidian University, Xi’an Shaanxi 710071, ChinaSchool of Aerospace Science and Technology, Xidian University, Xi’an Shaanxi 710071, ChinaA two-dimensional axisymmetric inductively coupled plasma (ICP) model with its implementation in the COMSOL (Multi-physics simulation software) platform is described. Specifically, a large size ICP generator filled with argon is simulated in this study. Distributions of the number density and temperature of electrons are obtained for various input power and pressure settings and compared. In addition, the electron trajectory distribution is obtained in simulation. Finally, using experimental data, the results from simulations are compared to assess the veracity of the two-dimensional fluid model. The purpose of this comparison is to validate the veracity of the simulation model. An approximate agreement was found (variation tendency is the same). The main reasons for the numerical magnitude discrepancies are the assumption of a Maxwellian distribution and a Druyvesteyn distribution for the electron energy and the lack of cross sections of collision frequencies and reaction rates for argon plasma.http://dx.doi.org/10.1063/1.5016354
collection DOAJ
language English
format Article
sources DOAJ
author Fan Lei
Xiaoping Li
Yanming Liu
Donglin Liu
Min Yang
Yuanyuan Yu
spellingShingle Fan Lei
Xiaoping Li
Yanming Liu
Donglin Liu
Min Yang
Yuanyuan Yu
Simulation of a large size inductively coupled plasma generator and comparison with experimental data
AIP Advances
author_facet Fan Lei
Xiaoping Li
Yanming Liu
Donglin Liu
Min Yang
Yuanyuan Yu
author_sort Fan Lei
title Simulation of a large size inductively coupled plasma generator and comparison with experimental data
title_short Simulation of a large size inductively coupled plasma generator and comparison with experimental data
title_full Simulation of a large size inductively coupled plasma generator and comparison with experimental data
title_fullStr Simulation of a large size inductively coupled plasma generator and comparison with experimental data
title_full_unstemmed Simulation of a large size inductively coupled plasma generator and comparison with experimental data
title_sort simulation of a large size inductively coupled plasma generator and comparison with experimental data
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2018-01-01
description A two-dimensional axisymmetric inductively coupled plasma (ICP) model with its implementation in the COMSOL (Multi-physics simulation software) platform is described. Specifically, a large size ICP generator filled with argon is simulated in this study. Distributions of the number density and temperature of electrons are obtained for various input power and pressure settings and compared. In addition, the electron trajectory distribution is obtained in simulation. Finally, using experimental data, the results from simulations are compared to assess the veracity of the two-dimensional fluid model. The purpose of this comparison is to validate the veracity of the simulation model. An approximate agreement was found (variation tendency is the same). The main reasons for the numerical magnitude discrepancies are the assumption of a Maxwellian distribution and a Druyvesteyn distribution for the electron energy and the lack of cross sections of collision frequencies and reaction rates for argon plasma.
url http://dx.doi.org/10.1063/1.5016354
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AT xiaopingli simulationofalargesizeinductivelycoupledplasmageneratorandcomparisonwithexperimentaldata
AT yanmingliu simulationofalargesizeinductivelycoupledplasmageneratorandcomparisonwithexperimentaldata
AT donglinliu simulationofalargesizeinductivelycoupledplasmageneratorandcomparisonwithexperimentaldata
AT minyang simulationofalargesizeinductivelycoupledplasmageneratorandcomparisonwithexperimentaldata
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