All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing

All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing

We present the design, fabrication and characterization of a new all-optical frequency modulated pressure sensor. Using the tangential strain in a circular membrane, a waveguide with an integrated nanoscale Bragg grating is strained longitudinally proportional to the applied pressure causing a shift...

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Bibliographic Details
Main Authors: Ole Hansen, Kasper Reck, Erik V. Thomsen
Format: Article
Language:English
Published: MDPI AG 2011-11-01
Series:Sensors
Subjects:
optical sensor
MEMS
Bragg grating
Online Access:http://www.mdpi.com/1424-8220/11/11/10615/

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