UV-A Sensor Based on 6H-SiC Schottky Photodiode
In this paper, we propose a UV-A sensor based on a 6H-SiC Schottky photodiode with a thin Ni<sub>2</sub>Si front electrode and an integrated hydrogenated silicon nitride (SiN:H) dielectric filter. 6H-SiC prototypes were fabricated by using a manufacturing process to a large extent alread...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2017-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7814212/ |