Exploration of Growth Window for Phase-Pure Cubic Boron Nitride Films Prepared in a Pure N2 Plasma

Exploration of Growth Window for Phase-Pure Cubic Boron Nitride Films Prepared in a Pure N2 Plasma

Cubic boron nitride (c-BN) films were prepared via radio frequency (RF) magnetron sputtering from a hexagonal boron nitride (h-BN) target in a pure N2 plasma. The composition and microstructure morphology of the BN films with different deposition times under pure N2 plasma or mixed Ar/N2 plasma were...

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Bibliographic Details
Main Authors: Wei Gao, Yujing Li, Yuyuan Zhang, Hong Yin
Format: Article
Language:English
Published: MDPI AG 2018-02-01
Series:Coatings
Subjects:
cubic boron nitride
magnetron sputtering
gas composition
nucleation
substrate bias
Online Access:http://www.mdpi.com/2079-6412/8/2/82

Internet

http://www.mdpi.com/2079-6412/8/2/82

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