Mechanical Characterization of PDMS Films for the Optimization of Polymer Based Flexible Capacitive Pressure Microsensors
This paper reports on the optimization of flexible PDMS-based normal pressure capacitive microsensors dedicated to wearable applications. The operating principle and the fabrication process of such microsensors are presented. Then, the deformations under local pressure of PDMS thin films of thicknes...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2017-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2017/8235729 |