Generation of a controllable electron density gradient using a single plasma source
In this work, an experimental design for generation of the controllable electron density gradient is achieved through a large area oxide coated cathode and two stainless meshes. The large area oxide coated cathode is adopted to produce a large area, uniform and high density plasma, and these two met...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2019-05-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5094868 |