METHOD OF OPTIMAL MEASUREMENT STRATEGY FOR ULTRA-HIGH-PRECISION MACHINE IN ROUNDNESS NANOMETROLOGY

METHOD OF OPTIMAL MEASUREMENT STRATEGY FOR ULTRA-HIGH-PRECISION MACHINE IN ROUNDNESS NANOMETROLOGY

Bibliographic Details
Main Author: Salah H. R. Ali
Format: Article
Language:English
Published: Exeley Inc. 2015-06-01
Series:International Journal on Smart Sensing and Intelligent Systems
Subjects:
Nanometrology
Talyrond instrument
roundness
reference algorithms
software fitting filters
uncertainty and evaluation method.
Online Access:https://www.exeley.com/exeley/journals/in_jour_smart_sensing_and_intelligent_systems/8/2/pdf/10.21307_ijssis-2017-788.pdf
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spelling doaj-8ab8f4a6b67340a89e6fd9fba37b199e2020-11-25T02:33:58ZengExeley Inc.International Journal on Smart Sensing and Intelligent Systems1178-56082015-06-018210.21307/ijssis-2017-788METHOD OF OPTIMAL MEASUREMENT STRATEGY FOR ULTRA-HIGH-PRECISION MACHINE IN ROUNDNESS NANOMETROLOGYSalah H. R. Ali0National Institute for Standards (NIS), Giza (12211-136), Egypt.https://www.exeley.com/exeley/journals/in_jour_smart_sensing_and_intelligent_systems/8/2/pdf/10.21307_ijssis-2017-788.pdfNanometrologyTalyrond instrumentroundnessreference algorithmssoftware fitting filtersuncertainty and evaluation method.
collection DOAJ
language English
format Article
sources DOAJ
author Salah H. R. Ali
spellingShingle Salah H. R. Ali
METHOD OF OPTIMAL MEASUREMENT STRATEGY FOR ULTRA-HIGH-PRECISION MACHINE IN ROUNDNESS NANOMETROLOGY
International Journal on Smart Sensing and Intelligent Systems
Nanometrology
Talyrond instrument
roundness
reference algorithms
software fitting filters
uncertainty and evaluation method.
author_facet Salah H. R. Ali
author_sort Salah H. R. Ali
title METHOD OF OPTIMAL MEASUREMENT STRATEGY FOR ULTRA-HIGH-PRECISION MACHINE IN ROUNDNESS NANOMETROLOGY
title_short METHOD OF OPTIMAL MEASUREMENT STRATEGY FOR ULTRA-HIGH-PRECISION MACHINE IN ROUNDNESS NANOMETROLOGY
title_full METHOD OF OPTIMAL MEASUREMENT STRATEGY FOR ULTRA-HIGH-PRECISION MACHINE IN ROUNDNESS NANOMETROLOGY
title_fullStr METHOD OF OPTIMAL MEASUREMENT STRATEGY FOR ULTRA-HIGH-PRECISION MACHINE IN ROUNDNESS NANOMETROLOGY
title_full_unstemmed METHOD OF OPTIMAL MEASUREMENT STRATEGY FOR ULTRA-HIGH-PRECISION MACHINE IN ROUNDNESS NANOMETROLOGY
title_sort method of optimal measurement strategy for ultra-high-precision machine in roundness nanometrology
publisher Exeley Inc.
series International Journal on Smart Sensing and Intelligent Systems
issn 1178-5608
publishDate 2015-06-01
topic Nanometrology
Talyrond instrument
roundness
reference algorithms
software fitting filters
uncertainty and evaluation method.
url https://www.exeley.com/exeley/journals/in_jour_smart_sensing_and_intelligent_systems/8/2/pdf/10.21307_ijssis-2017-788.pdf
work_keys_str_mv AT salahhrali methodofoptimalmeasurementstrategyforultrahighprecisionmachineinroundnessnanometrology
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