Structural characterization and phase transformations in metal oxide fi lms synthesized by Successive Ionic Layer Deposition (SILD) method

Structural characterization and phase transformations in metal oxide fi lms synthesized by Successive Ionic Layer Deposition (SILD) method

In this paper the peculiarities of phase composition and morphology of metal oxides synthesized by successive ionic layer deposition (SILD) method are discussed. The main attention is focused on SnO2–based metal oxides, which are promising materials for gas sensor applications. FTIR spectroscopy has...

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Bibliographic Details
Main Authors: Ghenadii Korotcenkov, Sang Do Han, Beongki Cho, Valeri Tolstoy
Format: Article
Language:English
Published: University of Novi Sad 2009-06-01
Series:Processing and Application of Ceramics
Subjects:
Metal oxide
Nanolayers
Microstructure
Composition
Characterization
Online Access:http://www.tf.uns.ac.rs/publikacije/PAC/pdf/38%20PAC%2004.pdf

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