FORMATION FEATURES AND PROPERTIES OF TITANIUM DIOXIDE FILMS

The study results of titanium dioxide thin film coatings formulated by various methods: by long oxidation of titanium metal films in the air, anodizing, pulsed thermal oxidation, sol-gel method are given. The optimal modes of formation are determined, barrier properties are compared, gas sensing cha...

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Bibliographic Details
Main Authors: M. O. Molodzechkin, V. A. Bogush
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-06-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
Online Access:https://doklady.bsuir.by/jour/article/view/600

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