FORMATION FEATURES AND PROPERTIES OF TITANIUM DIOXIDE FILMS
The study results of titanium dioxide thin film coatings formulated by various methods: by long oxidation of titanium metal films in the air, anodizing, pulsed thermal oxidation, sol-gel method are given. The optimal modes of formation are determined, barrier properties are compared, gas sensing cha...
Main Authors: | M. O. Molodzechkin, V. A. Bogush |
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Format: | Article |
Language: | Russian |
Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
Subjects: | |
Online Access: | https://doklady.bsuir.by/jour/article/view/600 |
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