Potentiality of zinc oxide nanosensor prepared by a new electroplating method on p-Si (1 1 1) wafer substrate

Nanostructured ZnO thin films were deposited on p-Si (1 1 1) substrates using a new electrodeposition method. Electrical and sensing properties were investigated. Variations of the resistance measured between two points of the ZnO film, have shown a maximum sensitivity (δ = 10) in the presence of ga...

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Bibliographic Details
Main Authors: Z. Messai, T. Devers, T. Mouet, Z. Ouennoughi, A. Boussahoul, A. Gamoura
Format: Article
Language:English
Published: Elsevier 2018-12-01
Series:Alexandria Engineering Journal
Online Access:http://www.sciencedirect.com/science/article/pii/S1110016818301637
Description
Summary:Nanostructured ZnO thin films were deposited on p-Si (1 1 1) substrates using a new electrodeposition method. Electrical and sensing properties were investigated. Variations of the resistance measured between two points of the ZnO film, have shown a maximum sensitivity (δ = 10) in the presence of gas ‹CO› and (δ = 14,70) in the presence of ‹C2H5OH› at a temperature of 300 °C. Therefore, we can say that the sensitivity tests indicate that the sensor consisting of a nanometer zinc oxide layer is more efficient at temperatures beyond 100 °C. Moreover, the sensing element has demonstrated a good response to reducing gases species. Keywords: Electrodeposition, ZnO, Ethanol/carbon monoxide sensor, Response/recovery times, Sensitivity
ISSN:1110-0168