Air-coupled PMUTs array with residual stresses: experimental tests in the linear and non-linear dynamic regime
The mechanical characterization of a 4 × 4 air-coupled array of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is presented. The experimental campaign consists of three set of experimental tests, namely: topography measurements, small signal dynamic measurements, and vibrometry in the no...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2020-10-01
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| Series: | International Journal of Smart and Nano Materials |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/19475411.2020.1834003 |