Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
We studied the tuning of structural and optical properties of ZnO thin film and its correlation to the efficiency of inverted solar cell using plasma-enhanced atomic layer deposition (PEALD). The sequential injection of DEZn and O2 plasma was employed for the plasma-enhanced atomic layer deposition...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2013-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4825230 |