Surface sintering of tungsten powder targets designed by electromagnetic discharge: A novel approach for film synthesis in magnetron sputtering
A three-dimensional (3D) sintering method of bulk magnetron targets has been developed recently. However, the use of bulk target had the following limitations: constrained geometry, limited chemical-phase composition, small size and cost-effectiveness. Thus a novel approach of surface sintering (2D)...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-06-01
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| Series: | Materials & Design |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127520301684 |