Polarization Beam Splitter Based on Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> Horizontal Slot Waveguides for On-Chip High-Power Applications

Polarization Beam Splitter Based on Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> Horizontal Slot Waveguides for On-Chip High-Power Applications

In this paper, we propose an Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> horizontal-slot-waveguide-based polarization beam splitter (PBS) with low nonlinearity for on-chip high-power systems. The coupling length ratio between the quasi-TE and quasi-TM modes (<i...

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Main Authors: Yuxi Fang, Changjing Bao, Zhonghan Wang, Yange Liu, Lin Zhang, Hao Huang, Yongxiong Ren, Zhongqi Pan, Yang Yue
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Sensors
Subjects:
optical waveguide
silicon photonics
silicon nitride
optical polarization
Online Access:https://www.mdpi.com/1424-8220/20/10/2862
id doaj-8404df19bc4143b1b81ce7a9cc23bb86
record_format Article
spelling doaj-8404df19bc4143b1b81ce7a9cc23bb862020-11-25T03:21:43ZengMDPI AGSensors1424-82202020-05-01202862286210.3390/s20102862Polarization Beam Splitter Based on Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> Horizontal Slot Waveguides for On-Chip High-Power ApplicationsYuxi Fang0Changjing Bao1Zhonghan Wang2Yange Liu3Lin Zhang4Hao Huang5Yongxiong Ren6Zhongqi Pan7Yang Yue8Institute of Modern Optics, Nankai University, Tianjin 300350, ChinaDepartment of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, USAInstitute of Modern Optics, Nankai University, Tianjin 300350, ChinaInstitute of Modern Optics, Nankai University, Tianjin 300350, ChinaSchool of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, ChinaDepartment of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, USADepartment of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, USADepartment of Electrical and Computer Engineering, University of Louisiana at Lafayette, Lafayette, LA 70504, USAInstitute of Modern Optics, Nankai University, Tianjin 300350, ChinaIn this paper, we propose an Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> horizontal-slot-waveguide-based polarization beam splitter (PBS) with low nonlinearity for on-chip high-power systems. The coupling length ratio between the quasi-TE and quasi-TM modes (<i>L</i><sub>TE</sub>/<i>L</i><sub>TM</sub>) was optimized to 2 for an efficient polarization splitting. For the single-slot design, the coupling length of the PBS was 281.5 μm, while the extinction ratios (ER) of the quasi-TM and quasi-TE modes were 23.9 dB and 20.8 dB, respectively. Compared to PBS based on the Si<sub>3</sub>N<sub>4</sub> strip waveguide, the coupling length became 22.6% shorter. The proposed PBSs also had a relatively good fabrication tolerance for an ER of >20 dB. For the multi-slot design, the coupling length of the PBS was 290.3 μm, while the corresponding ER of the two polarizations were 24.0 dB and 21.0 dB, respectively. Furthermore, we investigated the tradeoff between the ER and coupling length for the optimized PBSs with single slot or multiple slots.https://www.mdpi.com/1424-8220/20/10/2862optical waveguidesilicon photonicssilicon nitrideoptical polarization
collection DOAJ
language English
format Article
sources DOAJ
author Yuxi Fang
Changjing Bao
Zhonghan Wang
Yange Liu
Lin Zhang
Hao Huang
Yongxiong Ren
Zhongqi Pan
Yang Yue
spellingShingle Yuxi Fang
Changjing Bao
Zhonghan Wang
Yange Liu
Lin Zhang
Hao Huang
Yongxiong Ren
Zhongqi Pan
Yang Yue
Polarization Beam Splitter Based on Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> Horizontal Slot Waveguides for On-Chip High-Power Applications
Sensors
optical waveguide
silicon photonics
silicon nitride
optical polarization
author_facet Yuxi Fang
Changjing Bao
Zhonghan Wang
Yange Liu
Lin Zhang
Hao Huang
Yongxiong Ren
Zhongqi Pan
Yang Yue
author_sort Yuxi Fang
title Polarization Beam Splitter Based on Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> Horizontal Slot Waveguides for On-Chip High-Power Applications
title_short Polarization Beam Splitter Based on Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> Horizontal Slot Waveguides for On-Chip High-Power Applications
title_full Polarization Beam Splitter Based on Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> Horizontal Slot Waveguides for On-Chip High-Power Applications
title_fullStr Polarization Beam Splitter Based on Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> Horizontal Slot Waveguides for On-Chip High-Power Applications
title_full_unstemmed Polarization Beam Splitter Based on Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> Horizontal Slot Waveguides for On-Chip High-Power Applications
title_sort polarization beam splitter based on si<sub>3</sub>n<sub>4</sub>/sio<sub>2</sub> horizontal slot waveguides for on-chip high-power applications
publisher MDPI AG
series Sensors
issn 1424-8220
publishDate 2020-05-01
description In this paper, we propose an Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> horizontal-slot-waveguide-based polarization beam splitter (PBS) with low nonlinearity for on-chip high-power systems. The coupling length ratio between the quasi-TE and quasi-TM modes (<i>L</i><sub>TE</sub>/<i>L</i><sub>TM</sub>) was optimized to 2 for an efficient polarization splitting. For the single-slot design, the coupling length of the PBS was 281.5 μm, while the extinction ratios (ER) of the quasi-TM and quasi-TE modes were 23.9 dB and 20.8 dB, respectively. Compared to PBS based on the Si<sub>3</sub>N<sub>4</sub> strip waveguide, the coupling length became 22.6% shorter. The proposed PBSs also had a relatively good fabrication tolerance for an ER of >20 dB. For the multi-slot design, the coupling length of the PBS was 290.3 μm, while the corresponding ER of the two polarizations were 24.0 dB and 21.0 dB, respectively. Furthermore, we investigated the tradeoff between the ER and coupling length for the optimized PBSs with single slot or multiple slots.
topic optical waveguide
silicon photonics
silicon nitride
optical polarization
url https://www.mdpi.com/1424-8220/20/10/2862
work_keys_str_mv AT yuxifang polarizationbeamsplitterbasedonsisub3subnsub4subsiosub2subhorizontalslotwaveguidesforonchiphighpowerapplications
AT changjingbao polarizationbeamsplitterbasedonsisub3subnsub4subsiosub2subhorizontalslotwaveguidesforonchiphighpowerapplications
AT zhonghanwang polarizationbeamsplitterbasedonsisub3subnsub4subsiosub2subhorizontalslotwaveguidesforonchiphighpowerapplications
AT yangeliu polarizationbeamsplitterbasedonsisub3subnsub4subsiosub2subhorizontalslotwaveguidesforonchiphighpowerapplications
AT linzhang polarizationbeamsplitterbasedonsisub3subnsub4subsiosub2subhorizontalslotwaveguidesforonchiphighpowerapplications
AT haohuang polarizationbeamsplitterbasedonsisub3subnsub4subsiosub2subhorizontalslotwaveguidesforonchiphighpowerapplications
AT yongxiongren polarizationbeamsplitterbasedonsisub3subnsub4subsiosub2subhorizontalslotwaveguidesforonchiphighpowerapplications
AT zhongqipan polarizationbeamsplitterbasedonsisub3subnsub4subsiosub2subhorizontalslotwaveguidesforonchiphighpowerapplications
AT yangyue polarizationbeamsplitterbasedonsisub3subnsub4subsiosub2subhorizontalslotwaveguidesforonchiphighpowerapplications
_version_ 1724612947577143296

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