Piezoelectrically Driven and Sensed Micromirrors with Extremely Large Scan Angles and Precise Closed-Loop Control

Piezoelectrically Driven and Sensed Micromirrors with Extremely Large Scan Angles and Precise Closed-Loop Control

This paper reports piezoelectrically driven and sensed micromirrors achieving extremely large total optical scan angle of 106° and high frequency of 45 kHz at 22 V. To reach such large angles, extensive FEM-simulations relating to fracture strength of poly-Si, of which these micromirrors primarily c...

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Bibliographic Details
Main Authors: Shanshan Gu-Stoppel, Thorsten Giese, Hans-Joachim Quenzer, Ulrich Hofmann, Wolfgang Benecke
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
micromirror
piezoelectric
closed-loop control
fracture behavior
Online Access:https://www.mdpi.com/2504-3900/1/4/561

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